High-Efficiency Integrated Vacuum Unit For Semiconductor Industry
Maximize industrial efficiency with Ever-Power’s Integrated Vacuum Unit. Our JZJLGB Series offers a high-performance, oil-free Roots and Dry Screw combination, ideal for Lithium battery, semiconductor, and coating applications. Discover the ultimate industrial vacuum system solution today.
JZJLGB Series Vacuum Pump Unit Performance
| Vacuum Pump Unit Model | JZJLGB150H-3T | JZJLGB300H-4T | JZJLGB600H-5T | JZJLGB1200H-5T | |
|---|---|---|---|---|---|
| Configuration | Main: ZJ150H Fore: LGB50 | Main: ZJ300H Fore: LGB70X | Main: ZJ600H Fore: LGB110X | Main: ZJ1200H Fore: LGB230A | |
| Pumping Speed (50Hz) | L/s | 150 | 300 | 600 | 1200 |
| m³/h | 540 | 1080 | 2160 | 4320 | |
| Ultimate Pressure (50Hz) | 0.5 Pa | 0.5 Pa | 0.5 Pa | 0.5 Pa | |
| Motor Power (Main / Fore) | 3 kW / 4 kW | 4 kW / 5.5 kW | 7.5 kW / 7.5 kW | 11 kW / 18.5 kW | |
| Connection | Inlet (mm) | 100 | 150 | 200 | 250 |
| Outlet (mm) | 40 | 40 | 40 | 80 | |
| Cooling Water | Pressure (MPa) | 0.2 ~ 0.35 | |||
| Flow (L/min) | 10 | 10 | 12 | 13 | |
| Temp (°C) | ≤40 | ||||
| Gas System | Pressure (MPa) | 0.05 | 0.05 | 0.05 | 0.06 |
| Flow (L/min) | 25~30 | 25~30 | 30~35 | 35~40 | |
| Ext. Cooling Water Drain | φ16 | φ16 | φ16 | φ16 | |
| Ext. Cooling Water Inlet | φ16 | φ16 | φ16 | φ16 | |
| Ext. Cooling Water Outlet | φ16 | φ16 | φ16 | φ16 | |
| Ext. Coolant Hose | φ16 | φ16 | φ16 | φ16 | |
| Ext. Purge Gas Hose | φ8 | φ8 | φ8 | φ8 | |
External dimensions drawing
The definitive Industrial Vacuum System solution. Combining the speed of ZJ Roots pumps with the reliability of LGB Dry Screw pumps for purely oil-free, high-vacuum performance.
Product Background: The Evolution of Centralized Vacuum
In the rapidly evolving landscapes of lithium battery manufacturing, semiconductor fabrication, and advanced thin-film coating, the demand for vacuum stability and purity has never been higher. Traditional setups often rely on scattered, individual pumps which lead to inconsistent pressure, high maintenance overheads, and increased energy consumption. The shift towards a Centralized vacuum unit architecture represents the modern standard for facility efficiency.
Ever-Power has engineered the JZJLGB Series Integrated vacuum unit to address these specific B2B challenges. By integrating a high-capacity Roots booster pump with a robust dry screw backing pump into a single, skid-mounted system, we provide a turnkey solution that delivers deep vacuum (0.5 Pa) with a clean, oil-free pumping chamber. This system is not merely a pump; it is a comprehensive High‑efficiency integrated vacuum unit for factories looking to optimize their production yield and reduce downtime.
Our integrated units are designed to serve as the heart of an Industrial central vacuum system, capable of handling complex gases, solvent recovery, and continuous operation loads that would overwhelm standard mechanical pumps.
Core Features & Advantages
1. Fully Integrated Design
The JZJLGB series is a true Integrated vacuum unit. By combining the ZJ series Roots vacuum pump (Main) with the LGB series dry screw vacuum pump (Fore), we eliminate the need for complex on-site assembly. The unit comes skid-mounted with all necessary piping, cooling interfaces, and electrical connections ready for plug-and-play integration.
2. Oil-Free & Contamination-Free
Crucial for the semiconductor and lithium industries, this unit utilizes dry screw technology as the backing pump. This ensures no oil back-streaming occurs, maintaining the purity of your vacuum chamber and solving the issue of oil emulsification common in wet pumps.
3. High Efficiency & Energy Saving
The combination of a Roots booster significantly increases pumping speed at lower pressures, while the variable pitch screw design of the backing pump reduces energy consumption. This makes it a High‑efficiency integrated vacuum unit for factories aiming to lower their carbon footprint and electricity bills.
4. Solvent Recovery Capability
Because the gas path is oil-free and non-contact, condensable solvents can be recovered at the exhaust without contaminating pump oil. This is a critical feature for chemical processing and battery slurry drying.
Industry Applications
The JZJLGB Central vacuum system is engineered for demanding environments where uptime and vacuum stability are non-negotiable.
- Lithium Battery Manufacturing
Used in the baking and drying of battery poles and cells. The oil-free nature prevents electrolyte contamination, while the high pumping speed ensures rapid drying cycles. - Semiconductor & Electronics
Ideal for CVD, PVD, and Etching processes. The unit can be equipped with an Integrated vacuum unit with HEPA filtration for industrial use (optional) to handle hazardous dust and ensuring cleanroom compliance. - Vacuum Coating
Provides the deep, stable vacuum required for thin-film deposition, ensuring uniform coating thickness and adhesion. - Pharmaceutical & Chemical
Perfect for vacuum distillation, freeze-drying, and degassing. The corrosion-resistant options allow for handling aggressive chemical vapors.
Selection Guide: Configuring Your Central Vacuum Unit
Choosing the correct Centralized vacuum unit requires careful consideration of several factors:
- Total Gas Load: Calculate the total volume of all chambers connected to the Industrial central vacuum system. Choose a model (e.g., JZJLGB1200H) that exceeds your peak flow requirement by at least 20%.
- Ultimate Pressure: Ensure the unit's ultimate pressure (0.5 Pa for the JZJLGB series) meets your process requirements. If deeper vacuum is needed, additional secondary pumps may be required.
- Process Gases: If your process involves flammable, explosive, or highly corrosive gases, please inform us. We offer specialized coatings and explosion-proof motors.
- Installation Environment: Consider the available footprint. Our skid-mounted units are compact, but adequate space for maintenance and cooling airflow is essential.
Installation & Maintenance
Proper setup ensures longevity. While we provide a comprehensive Central vacuum system installation and maintenance guide with every purchase, here are key points:
- Placement: Install on a flat, vibration-dampened foundation.
- Piping: Use vacuum-rated piping with minimal bends to maximize conductance. For a Industrial central vacuum system with multi‑point extraction, ensure proper valve isolation for each branch.
- Cooling: Connect to a reliable cooling water source (0.2~0.35 MPa) to prevent overheating during continuous operation.
- Maintenance: The dry screw and roots design minimizes maintenance. Primarily, check gear oil levels and cooling water flow. There are no oil filters to change in the pumping chamber itself.
Client Testimonials
"We upgraded our battery drying line to the Ever-Power JZJLGB1200H. The drying time was reduced by 30%, and the consistent vacuum level has significantly improved our yield rates. It is truly the Best integrated vacuum unit for manufacturing plant dust control and moisture removal we've used."
- Operations Director, Lithium Energy Corp.
"The integrated design saved us weeks of installation time. The unit arrived skid-mounted and was ready to run in days. The oil-free operation is perfect for our semiconductor cleanroom requirements."
- Facility Manager, Advanced Micro Devices Fab
Frequently Asked Questions (FAQ)
1. What is the main advantage of an Integrated Vacuum Unit over standalone pumps?
An integrated unit combines a booster (Roots) and a backing pump (Screw) into a optimized, skid-mounted system. This offers higher pumping speeds at low pressures, deeper ultimate vacuum, simpler installation, and centralized control compared to managing individual pumps.
2. Can this unit handle corrosive gases?
Yes. The LGB backing pump in the JZJLGB unit features corrosion-resistant coatings. For highly aggressive applications, we can customize the unit with specific materials (like Hastelloy coatings) and seal configurations to ensure longevity.
3. What maintenance does the JZJLGB series require?
The system is designed for low maintenance. Routine tasks involve checking cooling water flow, monitoring gear oil levels in the gearboxes (isolated from the vacuum chamber), and occasional cleaning of the inlet filters. There is no oil to change in the pumping chamber.
4. Can I control this unit remotely?
Absolutely. The unit comes with an integrated control panel, but it also supports PLC integration for remote monitoring and control via your factory's SCADA system, making it ideal for modern smart factories.
5. Is this system suitable for dust extraction?
While the pump itself handles some particulates, for heavy dust applications, we recommend configuring the Integrated vacuum unit with HEPA filtration for industrial use at the inlet. This protects the screw rotors and ensures long-term reliability.
Optimize Your Production with Ever-Power
Contact our engineering team today to design the perfect vacuum solution for your facility.
Additional information
| edited | by hyw |
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Product Quick Detail:
- Standard and non-standard available
- With high quality and competitive price
- Prompt delivery
- Packing as per customer’s demand.
We promise will offer the best price by the high quality in china! We also accept special order about the products. If you are interested in our products. Please do not hesitate to let us know.We are pleased to give you the detailed information.We promise that our products would be safety and were in high quality and reasonable price. If you are interested in our products, please contact us asap.We are sincerely looking for your cooperation.
Most of our products are exported to Europe or Americas, both standard and nonstandard products available. We can produce as per your drawing or sample. Material can be standard or as per your special request. If you choose us, you choose reliable.
Materials Available
1. Stainless Steel: SS201, SS303, SS304, SS316, SS416, SS420
2. Steel:C45(K1045), C46(K1046),C20
3. Brass:C36000 ( C26800), C37700 ( HPb59), C38500( HPb58), C27200(CuZn37), C28000(CuZn40)
4. Bronze: C51000, C52100, C54400, etc
5. Iron: 1213, 12L14,1215
6. Aluminum: Al6061, Al6063
7.OEM according to your request
Surface Treatment
Annealing, natural canonization, heat treatment, polishing, nickel plating, chrome plating, zinc plating,yellow passivization, gold passivization, satin, Black surface painted etc.
Processing Method
CNC machining, punch,turning, milling, drilling, grinding, broaching, welding and assembly
QC & Certificate
Technicians self-check in production,final-check before package by professional Quality inspector
ISO9001:2008 , ISO14001:2001,ISO/TS 16949:2009
Package & Lead Time
Size: Drawings
Wooden Case/Container and pallet, or as per customized specifications.
15-25days samples. 30-45days offcial order
Port: Shanghai/Ningbo port
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